ALYOBI, Mona; 						COBLEY, Richard.
Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials.
<strong>International Journal of Research in Science</strong>, [S.l.], v. 3, n. 2, p. 18-21, june 2017.
ISSN 2412-4389.
Available at: &lt;<a href="https://researchplusjournal.com/index.php/IJRS/article/view/270" target="_new">https://researchplusjournal.com/index.php/IJRS/article/view/270</a>&gt;. Date accessed: 25 aug. 2026.
doi: <a href="http://dx.doi.org/10.24178/ijrs.2017.3.2.18">http://dx.doi.org/10.24178/ijrs.2017.3.2.18</a>.